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WAFER SUPPORT JIG, VERTICAL HEAT TREATMENT BOAT INCLUDING WAFER SUPPORT JIG, AND METHOD FOR MANUFACTURING WAFER SUPPORT JIG
WAFER SUPPORT JIG, VERTICAL HEAT TREATMENT BOAT INCLUDING WAFER SUPPORT JIG, AND METHOD FOR MANUFACTURING WAFER SUPPORT JIG
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机译:晶片支撑夹具,包括晶片支撑夹具的垂直热处理船以及制造晶片支撑夹具的方法
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摘要
The present invention provides a wafer support jig having at least a support surface on which a treatment target wafer is mounted and supported when performing a heat treatment, wherein skewness Rsk on the support surface that supports the treatment target wafer is 0Rsk10, and 100 to 105 protruding objects each having a height of 2 μn or above and less than 30 μm are present within arbitrary 1 mm2 without protruding objects each having a height of 30 μm or above on the entire support surface. As a result, it is provided a wafer support jig that can reduce friction or adhesion of a support surface of the wafer support jig and the wafer when performing a heat treatment to the treatment target wafer such as a semiconductor wafer in a vertical heat treatment furnace, has an appropriate size distribution of the protruding objects on the support surface, and can suppress occurrence of slip dislocation, and to provide a vertical heat treatment boat including this wafer support jig, and a method for manufacturing the wafer support jig.
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机译:本发明提供了一种晶片支撑夹具,该晶片支撑夹具具有至少一个支撑表面,当执行热处理时,该支撑表面上安装并支撑有处理目标晶片,其中,在支撑处理目标的支撑表面上的偏斜度R sk Sub>晶片是0 sk Sub> <10,以及10 0 Sup>至10 5 Sup>突出的对象,每个对象的高度为2μn或更高且小于30μm存在于任意1 mm 2 Sup>范围内,整个支撑表面上均没有高度大于或等于30μm的突出物体。结果,提供了一种晶片支撑夹具,当在垂直热处理炉中对诸如半导体晶片的处理目标晶片进行热处理时,该晶片支撑夹具可以减小晶片支撑夹具和晶片的支撑表面的摩擦或粘附。本发明提供一种在支撑表面上具有适当尺寸的突出物的分布,并且能够抑制滑动错位的发生,并且提供一种包括该晶片支撑夹具的垂直热处理舟以及一种晶片支撑夹具的制造方法。
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