HIGH ACCURACY MEASURING METHOD USING STRAIGHTNESS MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device enabling highly-accurate straightness measurement by inhibiting any effect from a motional error caused in association with movement of a sensor or from a zero point error caused when using multiple sensors.;SOLUTION: The method accurately measures the straightness of a specific line S on a testing subject for calibration 10 in advance, and then uses sensors 40A, 40B, 42 to move and measure the specific line S to calculate a systematic error caused by either the motional error associated with the movement of the displacement sensor 42 or the zero point error between the sensor 40A and the sensor 40B. For an actual straightness measuring of an optional testing surface 14, the systematic error should be subtracted from the measurement obtained by the sensor at each measuring point.;COPYRIGHT: (C)2003,JPO