Tester for mixed signal semiconductor device and method of testing semiconductor device using the same

摘要

A tester for a mixed signal semiconductor device having a reconstructed digital tester, and a method of testing a semiconductor device using the same are provided. A digital tester electrically tests a digital device and is controlled by a first controller. A metrology instrument module comprising an analog source generator for applying an analog signal to a semiconductor device, an analog waveform digitizer for analyzing the analog signal into a digital signal, and a personal computer including a second controller forms a part of the digital tester, and the first controller is connected to the metrology instrument module through an interface line.