Method of and apparatus for measuring and evaluating material strength by detecting charged particles

摘要

The present invention is formed by detecting the charged particles generated during film peeling and fragility breaking, so that it is possible to specify a peel occurring time and a fragility breaking time, with a high sensitivity and a high accuracy. In this way, it becomes possible to correctly measure the peel strength and the fragility breaking strength. The method of the invention comprises the steps of pressing an indenter into a test object and measuring an indentation load as well as an indentation depth, while at the same time detecting charged particles omitted from a peel starting point or a breakage starting point; specifying a peel occurring time and a fragility breaking time when charged particles are increased; measuring a peel strength and/or a fragility breaking strength.