Semiconductor analysis apparatus, semiconductor analysis method and method for manufacturing semiconductor device

摘要

In a semiconductor analysis method in accordance with the present invention, a semiconductor integrated circuit defining an object to be measured is put in an operating state, a laser beam is irradiated on the object to be measured, scattered light of the irradiated laser beam scattered on the object to be measured is spectroscopically separated by a Raman spectroscopy apparatus, amounts of shifts in Raman spectra appearing due to the Raman effect are calculated, temperature of minute areas of the object to be measured is calculated based on the relation between the temperature obtained in advance and the amounts of frequency shifts, and the defective location that is generating heat is detected based on the temperature.