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Method for plating a first layer on a substrate and a second layer on the first layer
Method for plating a first layer on a substrate and a second layer on the first layer
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机译:在基板上镀第一层并在第一层上镀第二层的方法
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摘要
A method and apparatus for plating a substrate is provided, wherein fine pits formed in the substrate, such as fine channels for wiring, are filled with a copper, copper alloy, or other material with low electrical resistance. The method is performed on a wafer W having fine pits (10) to fill the fine pits with a metal (13) and includes performing a first plating process (11) by immersing the wafer in a first plating solution having a composition superior in throwing power; and performing a second plating process (12) by immersing the substrate in a second plating solution having a composition superior in leveling ability.
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