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Intermediate liquid crystal display device product having an end point detection window, method of fabrication and method of detecting etching end point
Intermediate liquid crystal display device product having an end point detection window, method of fabrication and method of detecting etching end point
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机译:具有端点检测窗的中间液晶显示装置产品,制造方法和检测蚀刻端点的方法
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摘要
In a partially formed liquid crystal display device, a window definition layer defines an etching endpoint detection window over a dummy pattern formed on the substrate. The window definition layer also defines an etch window over a real pattern formed on the substrate. The real pattern and the dummy pattern have the same thickness. During an etching process, a reactant from the etching step is monitored to determine when to stop the etching process.
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