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Plasma energy control by inducing plasma instability
Plasma energy control by inducing plasma instability
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机译:通过诱导等离子体不稳定来控制等离子体能量
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摘要
In the present invention, electron temperature is controlled by modifying the power delivered to the plasma by inducing or enhancing natural instabilities between the plasma and the power source. As a result, no pulse modulation of the RF power or RF generator is required. The instability is enhanced until the desired reduction in electron temperature has been achieved. In accordance with the invention, there are several modes for inducing such a natural instability.
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