APPARATUS AND METHOD FOR THE SYNTHESIS OF THE DIAMOND WITH POWDER SHAPE BY CHEMICAL VAPOR DEPOSITION CVD METHOD

摘要

PURPOSE: A process for synthesizing diamond powder having several micrometers or less of small particle size and spherical particle shape by chemical vapor deposition method is provided, and an apparatus which is capable of synthesizing diamond powder in large quantities by modifying structure of a synthesizing apparatus is provided. CONSTITUTION: In a CVD (chemical vapor deposition) diamond synthesizing apparatus for synthesizing a film shaped diamond on the substrate I by forming plasma in a vacuum container(1) thereby decomposing a carbon source reaction gas, the apparatus for synthesizing spherical diamond powder(7) comprises a substrate I(3) which is directly contacted with plasma(2), and a substrate II(8) which is mounted on the circumference of the substrate I so that the substrate II is not directly contacted with plasma, wherein the apparatus for synthesizing spherical diamond powder(7) comprises a substrate I which is fabricated in a ring shape, and a substrate II which is mounted on inner and outer parts of the ring shaped substrate I so that the substrate II is not contacted with plasma, the apparatus for synthesizing spherical diamond powder comprises two or more substrates I for separating plasma into two or more, and a substrate II which is mounted on the circumference of the substrates I so that the substrate II is not contacted with plasma, and wherein the substrate II is installed within 10 cm from plasma with the substrate II not being contacted with plasma.