METHOD OF FINITE ELEMENT ANALYSIS FOR MICRO ELECTRO MECHANICAL SYSTEM BEHAVIOR SIMULATION

摘要

PURPOSE: A numerical analysis method for a micro-machine movement simulation is provided to use various finite element interpretation methods with respect to a mechanical system having various geometrical figure. CONSTITUTION: A mechanical system is divided into elements adapted to an interpretation(S700). The divided elements are divided into 20 nodal points(S801) and 8 nodal points(S802). A Gauss integration point is divided from the nodal point-divided elements. A 27-point complete integration and a 14-point reduced integration are performed to the 20 nodal points-divided elements(S803). An 8-point complete integration and a 1-point reduced integration are performed to the 8 nodal points-divided elements(S804). The calculated result values are compared therewith, and the optimum result value is searched(S900).