A vacuum arc - plasma source with magnet - particle filter

摘要

A vacuum arc plasma source, with a magnetic particle filter, has an anode compensation coil which is oppositely connected with respect to the magnetic particle filter coil so that the magnetic fields of the coils have opposite directions. In a magnetically filtered vacuum arc plasma source, the greatest axial distance between the filter-facing anode surface and the cathode front face is smaller than the opening diameter of the annular anode (2) and a compensation coil (11) is provided within the anode (2) in the axial direction between the cathode (1) front face and the filter coil (7), the compensation coil (11) and the filter coil (7) being oppositely connected so that their magnetic fields have opposite directions.