首页> 外国专利> Process for fixing a semiconductor device on a switching device, used in flip-chip technology, comprises preparing a semiconductor device with bond pads on one surface

Process for fixing a semiconductor device on a switching device, used in flip-chip technology, comprises preparing a semiconductor device with bond pads on one surface

机译:在倒装芯片技术中使用的将半导体器件固定在开关器件上的方法包括制备在一个表面上具有接合焊盘的半导体器件。

摘要

Process for fixing a semiconductor device (B) on a switching device (S), comprises preparing a semiconductor device with bond pads on one surface. Process for fixing a semiconductor device (B) on a switching device (S) comprises: (1) preparing a semiconductor device with bond pads on one surface and a switching device with electrical contact surfaces (KF) on the surface facing the semiconductor device; (2) forming base bodies (GK) for fixing elements and for flexible contact elements (FK) made from elastic plastic by applying plastic on the semiconductor device using a mask and hardening; (3) forming the flexible contact elements by metallizing the bumps of the base bodies; (4) forming conducting pathways (LK) between the metallized bumps and the corresponding bond pads of the semiconductor device; (5) arranging the semiconductor device and the switching device toward each other; (6) pressing the flexible contact elements of the semiconductor device onto the contact surfaces of the switching device; and (7) connecting the fixing elements with the opposite lying surface in a buckled state with the flexible contact elements An Independent claim is also included for a device produced by the above process.
机译:将半导体器件(B)固定在开关器件(S)上的方法,包括制备在一个表面上具有焊盘的半导体器件。将半导体器件(B)固定在开关器件(S)上的方法包括:(1)制备在一个表面上具有接合焊盘的半导体器件,以及在面对半导体器件的表面上具有电接触表面(KF)的开关器件; (2)通过使用掩模在半导体器件上施加塑料并使其硬化,形成由弹性塑料制成的用于固定元件和柔性接触元件(FK)的基体(GK); (3)通过使基体的凸点金属化来形成柔性接触元件; (4)在金属化凸块与半导体器件的相应键合焊盘之间形成导电路径(LK); (5)将半导体装置和开关装置相对配置。 (6)将半导体器件的柔性接触元件压在开关器件的接触表面上; (7)通过挠性接触元件将处于弯曲状态的固定元件与相对的说谎表面连接在一起的柔性接触元件。对于通过上述方法制造的装置,还包括独立权利要求。

著录项

  • 公开/公告号DE10145468C1

    专利类型

  • 公开/公告日2003-01-16

    原文格式PDF

  • 申请/专利权人 INFINEON TECHNOLOGIES AG;

    申请/专利号DE20011045468

  • 发明设计人 FRANKOWSKY GERD;MEYER THORSTEN;

    申请日2001-09-14

  • 分类号H01L21/58;H01L25/065;H01L21/60;

  • 国家 DE

  • 入库时间 2022-08-21 23:42:42

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