Halftone phase shift mask blank for halftone phase shift mask manufacture, has phase shifter film to shift phase of transmitted light by predetermined quantity simultaneously, when portion of exposed light is transmitted

摘要

A phase shifter film containing silicon, oxygen and nitrogen shifts the phase of a transmitted light by a predetermined quantity simultaneously, when a portion of exposed light is transmitted, so that the light transmitted through the light transmission region and phase shifter region are canceled by each other. Independent claims are also included for the following: (1) halftone phase shift mask; and (2) halftone phase shift mask manufacturing method.