AIR FLOW RATE CONTROL DEVICE AND CLEAN ROOM AIR CONDITIONING SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an air flow rate control device capable of freely controlling a discharge flow rate of the cleaning air to an air filter of a clean room, and to provide a clean room air conditioning system utilizing the same.;SOLUTION: This air flow rate control device comprises a plurality of first bars 162 fixed by a frame 170, a plurality of second bars 164 vertically moved to the plurality of first bars to be connected with each other, and mounted in a state of respectively intersecting with the corresponding first bar at a lower part of the first bar, a control member 165 for vertically driving the plurality of second bars to adjust the flow rate of the air, and a connecting member 168 for connecting the plurality of second bars and the control member. This air flow rate control device supplies the air into the clean room by the vertical motion of the plurality of second bars to the plurality of first bars at a controllable speed.;COPYRIGHT: (C)2005,JPO&NCIPI