CONTAINER FOR TRANSPORTING SINGLE CRYSTAL FOR ETCHING, AND DEVICE FOR ETCHING SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a transport container and an etching device for a single crystal, easy in handleability and having structure effective for eliminating etching unevenness.;SOLUTION: This etching device is composed such that a receiving part 23 which is opened extendedly upward so as to enable placing of the single crystal 1 for etching thereon is provided in the transport container 2 for the single crystal, an opening 27 is formed on the bottom of the receiving part 23, a plurality of single crystal-receiving shafts 5 are provided protrusively on the bottom of an etching tank 4, and when putting the transport container 2 into the etching tank 4, the receiving shafts 5 are inserted through the opening 27 so that the single crystal 1 is upheld from the receiving part 23 by the receiving shafts 5.;COPYRIGHT: (C)2004,JPO