MULTISTAGE PISTON VACUUM PUMP AND ITS OPERATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a multistage piston vacuum pump that is formed so as to allow all the stages to be usable, so that pump characteristics are improved and effective exhaust becomes possible at each stage of an exahsut process.;SOLUTION: The pump is comprised of a housing (1) and at least two suction spaces (2) and (4). A system is formed composed of interconnecting pipings and valves between a suction side (16) and the suction space, or the suction spaces themselves. Via the interconnecting pipings and valves, it is possible to operate individual pump stages with parallel connection or series connection. Since the interconnecting pipings and valves are integrated in the pump housing, the pump permits a compact configuration and saves a space. It is possible to reduce the length of the interconnecting piping itself to a minimum.;COPYRIGHT: (C)2004,JPO