GLASS SUBSTRATE POLISHING HEAD, POLISHING DEVICE USING THIS POLISHING HEAD, GLASS SUBSTRATE POLISHING METHOD AND GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate polishing head, a polishing device, and a glass substrate polishing method having high polishing efficiency of a glass substrate.;SOLUTION: This glass substrate polishing head 1 comprises a head base part 2 forming a connecting part with the polishing device, a sub-carrier 3 arranged under the head base part 2, and receiving an upper surface of the glass substrate B by the lower end, and a support mechanism 4 interposed between the head base part 2 and the sub-carrier 3, and displaceably supporting the sub-carrier 3 in the vertical direction. The glass substrate polishing head 1 is provided with a driving force transmitting mechanism 68 for regulating the rotation of the sub-carrier 3 with respect to the head base part 2 while allowing the movement in the vertical direction of the sub-carrier 3.;COPYRIGHT: (C)2004,JPO&NCIPI