WAVE-GUIDING CHANNEL LAYER STRUCTURE, MANUFACTURING METHOD FOR PROBE HAVING THE WAVE-GUIDING CHANNEL LAYER STRUCTURE, PROBE HAVING THE WAVE-GUIDING CHANNEL LAYER STRUCTURE, STORAGE UNIT HAVING THE PROBE, SURFACE OBSERVATION UNIT, EXPOSURE UNIT, AND MANUFACTURING METHOD FOR DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently introduce and take out light into /from a light introducing/taking-out part.;SOLUTION: In wave-guiding channel layer structure constituted of a hollow or transparent medium having the light introducing/taking-out part for taking out the light guided by a wave-guiding channel layer to make incident into a probe having a micro-opening in its tip provided on the wave-guiding channel layer, or for introducing the light taken in from the micro-opening of the probe into the wave-guiding channel layer, the light introducing/taking-out part is constituted to have reflecting face structure forming 45 with respect to a wave-guiding direction for the light of the wave-guiding channel layer arranged in an inside of the wave-guiding channel layer.;COPYRIGHT: (C)2004,JPO