METHOD FOR LEVELING COATING FILM AND APPARATUS FOR LEVELING COATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for leveling a coating film by which an unevenness generated after a coating liquid is applied can be leveled and an apparatus for leveling by using the same.;SOLUTION: An air flow is formed on the lower face of a nozzle head 10 by forwarding a gas containing an organic solvent from a blow opening 10a, and sucking the gas containing the organic solvent from a suction hole 10b. While the air flow on the lower face of the nozzle head is pushed on the surface of the coating film formed on the surface of a base G to be treated, the nozzle 10 is carried in parallel to the treating face of the base to be treated by a specified interval to level the coating film R'.;COPYRIGHT: (C)2004,JPO&NCIPI