LEVELING APPARATUS, COATING FILM MANUFACTURING APPARATUS PROVIDED WITH SAME, AND COATING FILM MANUFACTURING METHOD

摘要

Disclosed is a leveling apparatus (10A) which is provided with: a conveyer which, while supporting the lower surface of a substrate (100), transfers the supported substrate (100) in the transfer direction, said substrate having a coating film material-containing solution applied to the upper surface; and a vibration applying unit (20A), which performs leveling of the solution applied to the substrate (100) by applying vibration to the substrate (100) moving in the transfer direction on a conveyer transfer path (11) defined by the conveyer.