Coating film manufacturing method and the coating film manufacturing equipment with this leveling and processing equipment

摘要

Leveling processor (10A), the conveyor while supporting the lower surface substrate solution containing the coating film material is applied to the upper surface (100) and conveyed along the conveying direction (100) substrate which is supported by the conveyor By imparting vibration for (100) substrate which is moving along the conveying direction Conveyance path defined (11) above, to perform leveling processing of the solution is coated on the substrate (100) I and a (20A) vibration imparting unit.