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Diffraction die chromatic aberration amendment scan optical system
Diffraction die chromatic aberration amendment scan optical system
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机译:衍射模色差修正扫描光学系统
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摘要
PROBLEM TO BE SOLVED: To provide a scanning optical system capable of avoiding degradation of plotting performance caused by fluctuation of wavelengths of light emitted from a light source by correcting chromatic aberration of magnification without increasing the number of scanning lenses. ;SOLUTION: A laser beam which is emitted from a light source 1 like semiconductor laser and made to be a parallel luminous flux is made incident on a polygon mirror (deflector) 4 driven to rotate around a rotary axis 4a via a cylindrical lens 3 having power only in the direction of sub-scanning, and scanned and deflected by the polygon mirror 4, to form an image on a plane to be scanned 5 via an fθ lens 20 of three-piece composition for scanning. A Fresnel lens-type diffraction lens structure acting to correct the chromatic aberration of magnification is formed at least on one surface of the fθ lens 20, and when the number of the periodical structures of the diffraction lens structure contained in the luminous flux made incident at a maximum angle is expressed by m and the maximum angle is expressed by W (degree), the diffraction lens structure is to be determined so as to satisfy the condition 0.3≤m/W≤4.0.;COPYRIGHT: (C)2000,JPO
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机译:解决的问题:提供一种扫描光学系统,该光学系统能够通过校正倍率色像差而避免由光源发出的光的波长的波动而引起的绘图性能的下降,而无需增加扫描透镜的数量。 ;解决方案:从像半导体激光器这样的光源1发出并成为平行光通量的激光束入射到多面镜(偏转器)4上,该多面镜经由具有以下特征的柱面透镜3绕旋转轴4a旋转:仅在副扫描方向上施加功率,并由多面镜4扫描和偏转,以通过fθ在要扫描的平面5上形成图像。三件式扫描透镜20。至少在fθ的一个表面上形成有用于校正倍率色像差的菲涅耳透镜型衍射透镜结构。当以最大角度入射的光束中包含的衍射透镜结构的周期性结构的数量用m表示并且最大角度用W(度)表示时,衍射透镜结构为确定满足条件0.3≤ m / W≤ 4.0。; COPYRIGHT:(C)2000,JPO
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