IRRADIATOR AND IRRADIATION METHOD, ANNEALER AND ANNEALING METHOD

摘要

PPROBLEM TO BE SOLVED: To manage irradiation of multiple light beams being emitted from a plurality of secondary light sources with a uniform intensity in real time. PSOLUTION: The irradiator comprises sections 6, 7 and 8 for irradiating a specified region with light beams being emitted from the plurality of secondary light sources generated by secondary light source generating sections 4 and 5 and guided along a specified optical path, an imaging section 12 inserted into the specified optical path while having a member 11 for separating/guiding the light beams emitted from the plurality of light sources and imaging the secondary light sources by condensing the light beams from the plurality of light sources thus separated and guided, a section 13 for picturizing the images of the plurality of light sources, and a section 16 for operating deviation of the multiple light beams impinging on the secondary light source generating sections 4 and 5 from the optical axis and deviation of the impinging position from the optical axis. PCOPYRIGHT: (C)2004,JPO