PROBLEM TO BE SOLVED: To provide a fringe phase analyzing method for separately determining the phase of a two-dimensional interference fringe by components.;SOLUTION: When m and n are integers of 3 or more which are mutually prime numbers, m×n pieces of images of two fringes of different directions are taken while phase-shifting them at equal intervals so to shift the phase of one fringe by the integer m periods and the other fringe by the integer n periods as the whole, respectively, n pieces of images are extracted every m pieces with respect to the one fringe, m pieces of images are extracted every n pieces with respect to the other fringe, and the phases related to the respective fringes are obtained by applying a phase shift method to the images extracted with respect to the respective fringes.;COPYRIGHT: (C)2003,JPO
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