MANUFACTURING METHOD OF MOLD FOR PRODUCING V-GROOVE, MANUFACTURING METHOD OF V-GROOVE STRUCTURED GOODS USING THE MOLD AND OBTAINED V-GROOVE STRUCTURED GOODS

摘要

PROBLEM TO BE SOLVED: To manufacture a mold by forming V-groove structure on a silicon substrate with high accuracy.;SOLUTION: A thermally oxidized film (SiO₂) 22 is formed on a (100) face of the silicon substrate 20 and then the thermally oxidized film 22 is patternized by lithography and dry etching. After O₂ ashing treatment is performed to the substrate for 1 minute to remove a resist, remaining resist is removed by washing with a mixture of sulfuric acid and water and then an oxidized thin film 28 is removed by etching with 1% hydrofluoric acid aqueous solution for 2 minutes. Further, etching is performed by using KOH solution of 85°C to form a V-groove 30 which has a V-shaped cross section and which stretches in a direction vertical to a paper surface. After performing callous washing, remaining mask of the oxidized film 22 is removed by etching with 7% hydrofluoric acid aqueous solution.;COPYRIGHT: (C)2004,JPO