Relating to the inspection manner and survey instrument null

摘要

PROBLEM TO BE SOLVED: To inspect a micro-actuator used for tracking control of the magnetic heads of hard disk drives for vibration frequency-velocity characteristic with an inexpensive measuring instrument without use of any expensive measuring instrument, such as an in-plane vibration laser Doppler velocimeter.;SOLUTION: Alternating-current driving voltage to a comb-like capacitor 41 installed on the micro-actuator 34 is varied over a specified range of frequency, and further the current value of each second harmonic component is measured. The frequency-current value characteristic of the second harmonic components is determined, and it is substituted for the vibration frequency- velocity characteristic of the micro-actuator 34.;COPYRIGHT: (C)2002,JPO