Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS

摘要

A microelectromechanical system (MEMS), formed on a substrate, comprises a utilization device having a first state and a second state, and a Lorentz force actuator having an actuator element coupled to the utilization device. The actuator element is displaceable by the Lorentz force to alter the state of the utilization device from the first state to the second state thereof. An electrostatic device, coupled to the utilization device, is electrically chargeable to electrostatically hold the utilization device in the second state thereof with minimal electrical power consumption. The utilization device may be of any kind including electrical, fluidic, optical or mechanical. For example, the utilization device may comprise an electrical switch, in which case the first state of the utilization device may comprise an open state of the switch and the second state may comprise a closed state of the switch. The bidirectionality of the Lorentz force facilitates opening a MEMS switch whose contacts are stuck and makes possible the design of MEMS switches having double-throw configurations. ;Also disclosed is a method for operating a MEMS actuator having an electrically conductive actuator element movable between a first position and a second position. The method comprises the steps of passing an electrical current through the actuator element in a predetermined direction in the presence of an intercepting magnetic field to move the actuator element from the first position toward the second position in response to the action of the Lorentz force, electrostatically holding the actuator element in the second position, and terminating the electrical current through the actuator element.