Semiconductor factory automation system and method for processing lot of semiconductor wafers at full-automation mode or semi-automation mode

摘要

A method for processing a lot of semiconductor wafers in a semiconductor factory automation (FA) system, wherein the lot is defined as a predetermined number of semiconductor wafers, includes the steps of: a) determining whether a first process equipment operable at a first operating mode has a job file corresponding to the lot of semiconductor wafers, wherein the job file represents data required for a semiconductor process; b) if the first process equipment operable at the first operating mode has the job file, processing the lot of semiconductor wafers according to the job file in the first process equipment; c) if the first process equipment operable at the first operating mode has not the job file, providing the job file to a second process equipment operable at a second operating mode; and d) processing the lot of semiconductor wafers according to the job file in the second process equipment. The method can effectively process a lot of semiconductor wafers at a full-automation mode or a semi-automation mode.