Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stage

摘要

An exposure device which includes a stage device having a first stage which movably supports an object and a drive mechanism which drives the first stage in at least a first direction. The first stage has a first portion coupled to the drive mechanism and a second portion for supporting the object. The first stage device is configured with a first position measuring device which measures the position of the first portion in a predetermined measurement direction. The exposure device further includes a first stage control system which controls the drive mechanism to control the position of the object in at least a first direction based on a measurement result obtained by the first position measuring device.