首页>
外国专利>
Process for growing a silicon crystal segment substantially free from agglomerated intrinsic point defects which allows for variability in the process conditions
Process for growing a silicon crystal segment substantially free from agglomerated intrinsic point defects which allows for variability in the process conditions
展开▼
机译:生长基本上没有附聚的本征点缺陷的硅晶体段的方法,该方法允许工艺条件的变化
展开▼
页面导航
摘要
著录项
相似文献
摘要
A process for growing a single crystal silicon ingot having an axially symmetric region substantially free of agglomerated intrinsic point defects. The ingot is grown generally in accordance with the Czochralski method; however, the manner by which the ingot is cooled from the temperature of solidification to a temperature which is in excess of about 900° C. is controlled to allow for the diffusion of intrinsic point defects, such that agglomerated defects do not form in this axially symmetric region. Accordingly, the ratio v/G0 is allowed to vary axially within this region, due to changes in v or G0, between a minimum and maximum value by at least 5%.
展开▼
机译:一种生长具有基本上没有聚集的本征点缺陷的轴向对称区域的单晶硅锭的方法。锭通常按照切克劳斯基方法生长。但是,将铸锭从凝固温度冷却至超过约900℃的温度的方式是优选的。控制C.以允许本征点缺陷的扩散,从而在该轴向对称区域中不会形成团聚的缺陷。相应地,由于v或G 0 Sub>的变化,允许比率v / G 0 Sub>在此区域内轴向变化,最小值和最大值之间的差值至少为5。 %。
展开▼