Very large angle integrated optical scanner made with an array of piezoelectric monomorphs

摘要

A micromachined mirror scanning system having plural benders of morphs and support arms between a mirror surface of silicon and a surrounding frame. Electrical energization of the morphs with a DC voltage under the control of a computer provides a large range of mirror orientations and positions and the devices occupy a small planar package. The devices of the invention are formed from a single wafer of silicon and have low response times and large scan angles.