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MODELING DEVICES IN CONSIDERATION OF PROCESS FLUCTUATIONS
MODELING DEVICES IN CONSIDERATION OF PROCESS FLUCTUATIONS
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机译:考虑过程波动的设备建模
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摘要
The present invention includes a method for generating typical and corner device models to account for statistical variations in a semiconductor device fabrication process. The typical and corner models can be generated before the semiconductor device fabrication process is fully developed based on a process specification associated with the semiconductor device fabrication process. The typical and corner models can also be generated with better accuracy after the semiconductor device fabrication process is developed and measured data are available for model generation.
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