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Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel
Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel
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机译:在长波长vcsel中使氧化物孔与环形腔内接触自对准的方法
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摘要
A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser.
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