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Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength VCSEL

机译：在长波长VCSEL中使氧化物孔与环形腔内接触自动对准的方法

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摘要

A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser.

机译：形成垂直腔表面发射激光器（ 100、600、900 ）的方法包括用于自对准p型欧姆接触（ 118、518、932 ），氧化物电流孔（ 122、926 a ）和中心回填材料（ 560 a < / I> ，936 ）围绕激光的光轴。 展开▼

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公开/公告号US6916672B2

专利类型

公开/公告日2005-07-12

原文格式PDF

申请/专利权人 LEO M. F. CHIROVSKY;RYAN LIKEKE NAONE;DAVID KISKER;STEWART FELD;
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申请/专利号US20040811624

发明设计人 LEO M. F. CHIROVSKY;RYAN LIKEKE NAONE;DAVID KISKER;STEWART FELD;
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申请日2004-03-29

分类号H01L21/20;

国家 US

入库时间 2022-08-21 22:21:25

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1. 自对准接触孔层间膜及制作方法、接触孔刻蚀的方法 [P] . 中国专利： CN101452905B . 2012.07.11

2. 自对准接触孔层间膜及制作方法、接触孔刻蚀的方法 [P] . 中国专利： CN101452905A . 2009-06-10

3. METHOD OF SELF-ALIGNING AN OXIDE APERTURE WITH AN ANNULAR INTRA-CAVITY CONTACT IN A LONG WAVELENGTH VCSEL [P] . AU2003256382A1 . 2004-01-23

机译：自对准长腔VCSEL环形腔内氧化孔的方法

4. Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel [P] . AU2003256382A8 . 2004-01-23

机译：在长波长vcsel中使氧化物孔与环形腔内接触自对准的方法

5. METHOD OF SELF-ALIGNING AN OXIDE APERTURE WITH AN ANNULAR INTRA-CAVITY CONTACT IN A LONG WAVELENGTH VCSEL [P] . 世界知识产权组织专利： WO2004006393A2 . 2004-01-15

机译：自对准长腔VCSEL环形腔内氧化孔的方法

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