We report on the development of a surface micromachined process for the fabrication of coaxial apertures surrounded by periodic grooves. The process uses a combination of copper electroforming and the negative epoxy based resist, SU8, as a thin flexible substrate. The device dimensions are suitable for the implementation of filters at THz frequencies, and measurements show a pass band centred around 1.5 THz. These devices could form the basis of the next generation of THz biosensors.
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