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Feature biassing and absorptive phase-shifting techniques to improve optical projection imaging
Feature biassing and absorptive phase-shifting techniques to improve optical projection imaging
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机译:特征偏置和吸收性相移技术可改善光学投影成像
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摘要
Feature biassing applied to phase shifting masks is used to improve the exposure latitude and depth of focus of an optical projection imaging system. Making the phase shifters absorptive facilitates a phase shifting mask system for arbitrary layouts. Combining phase shifters of different levels of absorption further enhance the improvements. Even more enhancement can be gained by combining biassing with absorption levels.
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