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Techniques for the improvement of the optical projection image processing by feature change and absorbing phase shift
Techniques for the improvement of the optical projection image processing by feature change and absorbing phase shift
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机译:通过特征变化和吸收相移来改善光学投影图像处理的技术
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摘要
Feature biassing applied to phase shifting masks is used to improve the exposure latitude and depth of focus of an optical projection imaging system. Making the phase shifters absorptive facilitates a phase shifting mask system for arbitrary layouts. Combining phase shifters of different levels of absorption further enhance the improvements. Even more enhancement can be gained by combining biassing with absorption levels.
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