Vacuum sealing system between gas injection ring and chamber wall in semiconductor manufacturing equipment

摘要

PURPOSE: A vacuum sealing system in semiconductor manufacturing equipment is provided to be capable of securing the vacuum sealing between a chamber wall and a gas injection ring. CONSTITUTION: A vacuum sealing system in semiconductor manufacturing equipment is provided with a chamber wall(100) having a groove, an O-ring(400) inserted into the groove, and a gas injection ring(200) for facing the chamber wall. At this time, the O-ring is between the chamber wall and the gas injection ring. Preferably, the chamber wall is bottom portion and the gas injection ring is loaded on the chamber wall.