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METHOD FOR FABRICATING A SUBSTRATE FOR AN ELECTRO-OPTICAL DEVICE AND A METHOD FOR FABRICATING THE ELECTRO-OPTICAL DEVICE TO QUICKLY AND INEXPENSIVELY FABRICATE A CONCAVO-CONVEX SHAPE OF A REFLECTIVE SURFACE
METHOD FOR FABRICATING A SUBSTRATE FOR AN ELECTRO-OPTICAL DEVICE AND A METHOD FOR FABRICATING THE ELECTRO-OPTICAL DEVICE TO QUICKLY AND INEXPENSIVELY FABRICATE A CONCAVO-CONVEX SHAPE OF A REFLECTIVE SURFACE
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机译:一种用于制造光电器件基体的方法和一种制造光电器件以快速且廉价地制造反射表面的凸凹形状的方法
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摘要
PURPOSE: A method for fabricating a substrate for an electro-optical device and a method for fabricating the electro-optical device to quickly and inexpensively fabricate a concavo-convex shape of a reflective surface are provided to enhance the reflective-type display quality of the electro-optical device by improving the scattering characteristic of the reflective surface. CONSTITUTION: In an exposure process, a photosensitive resin(101) disposed on a substrate(111) is exposed using a mask pattern having a light transmission part(102x) and a light shielding part. In a developing process, the exposed resin is developed. In a reflective layer forming process, a reflective layer(112) is formed on the resin. In the exposure process, the resin is exposed in a state in which the exposure strength distribution on the surface of the resin is increased and decreased as a curved shape along the corresponding surface. In the developing process, a resin layer having a surface concavo-convex shape corresponding to the exposure strength distribution is formed.
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