CANTILEVER-TYPE PROBE CARD AND METHOD FOR MANUFACTURING THE SAME USING SILICON MICROMACHINING TECHNOLOGY

摘要

PURPOSE: A cantilever-type probe card and a fabricating method thereof are provided to separate easily signals and narrow the pitch between tips and improve mechanical characteristics of the tips by using a fine processing method to form a probe tip. CONSTITUTION: A cantilever-shaped probe card includes a first silicon layer, an insulating layer, a second silicon layer, a conductive layer, a PCB, and a metal line. The first silicon layer(111) includes a spring part(117) and a front tip part(119). The spring part is made up of silicon. The front tip part is connected to one side of the spring part. The insulating layer(112) is formed at an edge of the silicon layer. The second silicon layer(113) is formed on the insulating layer. The conductive layer(129) is formed at a through-hole(123). The PCB(200) is electrically connected to the conductive layer in the second silicon layer. The metal line(201) is formed at the front tip part and the spring part in order to be electrically connected to the conductive layer in the first silicon layer.