PLATE SHOWER HEAD WITH GAS DISTRIBUTION PLATE AND GAS DIFFUSION METHOD USING THE SAME TO INJECT GAS MORE UNIFORMLY

摘要

PURPOSE: A plate shower head with a gas distribution plate is provided to inject gas more uniformly by simplifying the method for distributing a plate and by injecting gas of a diffusion type. CONSTITUTION: Gas inlets(412b,412c) for inner and outer regions are formed in a manner that the process gas induced from a process gas introducing hole(412a) flows sufficiently, formed in a plate shower head body(411). A volume with a gap g is formed through the gas inlets for the inner and outer regions so that a gas diffusion in a dual or triple region is performed through a division barrier(413). A pressurizing plenum forms a buffer space in which a diffusion is performed such that the buffer space is divided by the division barrier. A center plate(101) is not divided to uniformly inject the process gas induced to the pressurizing plenum to a wafer(W). The center plate is formed in a plate(201) whose inside is divided. A divided flat-plate type gas distribution plate has a plate gap g formed by positioning a plate(301) whose inside is divided in the outside of the plate(201) whose inside is divided.