Fluid distributer of binary structure useful for uniform distribution of fluids, especially in supply of process gas in coating equipment, several equal size plates with two top plates and distribution plates between them

摘要

Fluid distributer of binary structure useful for uniform distribution of fluids, especially in the supply of process gas in coating equipment including a fluid-tight piled arrangement consisting of a number of equal size plates with two top plates and distribution plates between them, a fluid inlet (31), at least two fluid exits (32), where each distribution plate has at least one opening and so arranged that a branched binary structure is obtained between the fluid inlet and exits.