device for u043fu043bu0430u0437u043cu043eu0445u0438u043cu0438u0447u0435u0441u043au043eu0439 individual processing plates containing u0440u0435u0430u043au0446u0438u043eu043du043du043e bit cell with u043fu043bu043eu0441u043au043eu043fu0430u0440u0430u043bu043bu0435u043bu044cu043du044bu043cu0438 electrodes, one of which with u0435u0434u0438u043du0435u043d with hf generator, and the other with the holder plate ground, differing, however, that, in order to simplify the design and improve the fluidity of the processing,'ve ode, which is connected to the hf generator is in the form of a flat spiral springthe outer end of which is rigidly secured and the inside is installed with possibility of rotation about the axis, the width of the spiral spring is selected from u0443u0441u043bu043eu0432u0438u044fu0433u0434u0435 a shi rina spiral springs; d is the diameter of the plate; and n is the number of coils of the springs; b - distance is disabled, the interval is a spring, which is in accordance with the u043du0435u0440u0430u0432u0435u043du0441u0442u0432u043eu043cu0433u0434u0435 h - u0440u0430u0441u0441u0442u043e variant between the electrodes.
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