A method for the production and storage of microcomponents, magazine and method for microcomponents

摘要

A process for the preparation of a plurality of metallic components (10, 12) by means of photolithography and electroforming, wherein on an electrically conductive substrate (14) is a photoresist (16) in the required structural height is applied, the photoresist (16) for the transmission of the microstructures in the photoresist (16) is exposed and developed, by means of electroforming the microstructure in the photoresist (16) filled with metal and the substrate is subsequently removed, characterized in that the photoresist (16) itself a magazine (18, 20) for the components (10, 12) and in addition to the components (10, 12) further auxiliary structures (22, 24) by means of photolithography and electroforming in the photoresist (16) are generated.