Acceleration sensor has FET with two-layer electrode structure with first movable detection electrode for modulating current flow, second electrode with same deflection direction under acceleration

摘要

The acceleration sensor has a field effect transistor (2) with a two-layer electrode structure with a first movable detection electrode (41) for modulating a current flow under the effect of an acceleration and a second movable detection electrode (42) whose deflection direction with an acceleration acting is the same as that of the first detection electrode.