Highly reflective mirror for an excimer laser comprises a substrate, a first highly reflective layer system formed on the inner side of the substrate, and a second highly reflective layer system formed on the outer side of the substrate

摘要

Highly reflective mirror (1) comprises a substrate (2) having an inner side (2a) facing the laser-active medium of a laser and an outer side (2b) facing away from the inner side, a first highly reflective layer system (3) formed on the inner side of the substrate and reflecting a first wavelength, and a second highly reflective layer system (4) formed on the outer side of the substrate and reflecting a second wavelength. The first layer system and the substrate are formed so they are permeable for the second wavelength. Independent claims are also included for: (a) excimer laser pressure container; and (b) process for the production of an excimer laser mirror.