首页> 外国专利> A method for the production of integrated circuits with uniform silicide blocking layers and thus integrated circuits produced

A method for the production of integrated circuits with uniform silicide blocking layers and thus integrated circuits produced

机译:一种具有均匀硅化物阻挡层的集成电路的生产方法,由此生产出集成电路

摘要

A gate which has side walls, on a substrate of an integrated circuit. A barriers protection - spacer on the side walls of the gate is formed from. A portion of the barrier layer - spacer projects from the side walls of the gates, as a result of which a lower surface of the barriers protection - spacer is exposed, which is opposite the substrate of the integrated circuit. A silicide layer is applied to the section of the barriers protection - spacer, which projects from the side walls of the gates formed. There are also produced by the process by means of these circuits are provided.
机译:在集成电路的基板上具有侧壁的栅极。在栅的侧壁上形成阻挡保护-隔离物。阻挡层的一部分-间隔物从栅极的侧壁伸出,结果,阻挡层保护的下表面-间隔物被暴露出来,其与集成电路的衬底相对。将硅化物层施加到势垒保护部分-隔离物,该部分从形成的栅极的侧壁伸出。通过该方法还提供了通过这些电路产生的产品。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号