METHOD OF CONTROLLING GALVANOSCANNER, APPARATUS FOR CONTROLLING GALVANOSCANNER AND LASER MACHINING APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide a method of controlling a galvanoscanner, an apparatus for controlling the galvanoscanner and a laser machining apparatus, in which a machining with excellent accuracy is available even when a swing shaft is thermally deformed. PSOLUTION: A means is provided for storing the relationship between an electric current 21 supplied to an actuator 110 which turns a mirror and the displacement from a target value of an irradiated point, a displacement prediction apparatus 261 is provided for predicting the displacement in the electric current supplied to the actuator 110, the displacement in the irradiated point is predicted on the basis of the value of the electric current 21 when machining, and a target value is corrected so as to cancel the predicted displacement value. PCOPYRIGHT: (C)2006,JPO&NCIPI