DYNAMIC MATRIX SENSITIVITY MEASURING METHOD FOR FORCE SENSOR, AND INSTRUMENT THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a dynamic matrix sensitivity measuring method for a force sensor capable of measuring accurately dynamic sensitivity expressing a dynamic characteristic of the force sensor by a matrix, and an instrument for executing the method.;SOLUTION: Translation motion and rotation motion are imparted to a table 11 by an X-axis actuator 5, a Z-axis actuator 6 and a Y-axis actuator 7, vibration of the table 11 is detected as vibration in the first corner cube 3 by the first table face measuring actual time laser interferometers 21x, y, z, vibration in a sensor 1 of a calibration object fixed on the same table 11 is also measured as vibration in the second corner cube 13 via a mass 12 by the second table face measuring actual time laser interferometers 22x, y, z. Signals from the force sensor on the table 11, the respective interferometers, a force sensor for calibration and the like are input into a signal processor, and all the elements of the matrix are determined to measure the sensitivity.;COPYRIGHT: (C)2005,JPO&NCIPI