X-RAY DIFFRACTION ANALYZER AND METHOD FOR CORRECTING MEASUREMENT POSITION OF X-RAY DIFFRACTION ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray diffraction analyzer and a method for correcting a measurement position of the X-ray diffraction analyzer, which can improve measurement accuracy when analyzing a crystal structure of a sample.;SOLUTION: The X-ray diffraction analyzer includes an X-ray generator; a first stage; a detector which detects X-rays diffracted by the sample; a second stage in which the detector is disposed; and a moving section which is disposed between the second stage and the detector and moves the detector so as to make the spacing adjustable between the sample and the detector. In the method for correcting the measurement position of the X-ray diffraction analyzer, which uses the X-ray diffraction analyzer, a diffraction angle 2θ is measured by continuously or intermittently detecting X-rays diffracted by the sample having a known crystal structure, and a value of variation in the spacing D₂ between the sample and the detector by calculating errors between the lattice spacing of the sample and actual measurement values on the basis of the diffraction angle 2θ, and the position of the detector is adjusted in accordance with the value of variation in the spacing D₂.;COPYRIGHT: (C)2005,JPO&NCIPI